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Influence of Metal Substitution and Ion Energy on Microstru..:
Shu, Rui
;
Lundin, Daniel
;
Xin, Binbin
...
ACS Applied Electronic Materials. 3 (2021) 6 - p. 2748-2756 , 2021
Link:
https://doi.org/10.1021/acsaelm.1c00311
RT Journal T1 <Title>Influence of Metal Substitution and Ion Energy on Microstructure Evolution of High-Entropy Nitride (TiZrTaMe)N1–x (Me = Hf, Nb, Mo, or Cr) Films</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acsaelm.1c00311&Exemplar=1&LAN=DE A1 Shu, Rui A1 Lundin, Daniel A1 Xin, Binbin A1 Sortica, Mauricio A. A1 Primetzhofer, Daniel A1 Magnuson, Martin A1 le Febvrier, Arnaud A1 Eklund, Per PB American Chemical Society (ACS) YR 2021 SN 2637-6113 SN 2637-6113 JF ACS Applied Electronic Materials VO 3 IS 6 SP 2748 OP 2756 LK http://dx.doi.org/https://doi.org/10.1021/acsaelm.1c00311 DO https://doi.org/10.1021/acsaelm.1c00311 SF ELIB - SuUB Bremen
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