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Correction to "Influence of Metal Substitution and Ion Ener..:
Shu, Rui
;
Lundin, Daniel
;
Xin, Binbin
...
ACS Applied Electronic Materials. 4 (2022) 3 - p. 1367-1367 , 2022
Link:
https://doi.org/10.1021/acsaelm.2c00211
RT Journal T1 <Title>Correction to "Influence of Metal Substitution and Ion Energy on Microstructure Evolution of High-Entropy Nitride (TiZrTaMe)N1–x (Me = Hf, Nb, Mo, or Cr) Films"</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acsaelm.2c00211&Exemplar=1&LAN=DE A1 Shu, Rui A1 Lundin, Daniel A1 Xin, Binbin A1 Sortica, Mauricio A. A1 Primetzhofer, Daniel A1 Magnuson, Martin A1 Febvrier, Arnaud le A1 Eklund, Per PB American Chemical Society (ACS) YR 2022 SN 2637-6113 SN 2637-6113 JF ACS Applied Electronic Materials VO 4 IS 3 SP 1367 OP 1367 LK http://dx.doi.org/https://doi.org/10.1021/acsaelm.2c00211 DO https://doi.org/10.1021/acsaelm.2c00211 SF ELIB - SuUB Bremen
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