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Controlling the Wet-Etch Directionality in Nanostructured S..:
Aabdin, Zainul
;
Ghosh, Tanmay
;
Pacco, Antoine
...
ACS Applied Electronic Materials. 4 (2022) 11 - p. 5191-5198 , 2022
Link:
https://doi.org/10.1021/acsaelm.2c00824
RT Journal T1
Controlling the Wet-Etch Directionality in Nanostructured Silicon
UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acsaelm.2c00824&Exemplar=1&LAN=DE A1 Aabdin, Zainul A1 Ghosh, Tanmay A1 Pacco, Antoine A1 Raj, Sanoj A1 Do, Hue Thi Bich A1 Saidov, Khakimjon A1 Weei, Tjiu Weng A1 Anand, Utkarsh A1 Král, Petr A1 Holsteyns, Frank A1 Bosman, Michel A1 Mirsaidov, Utkur PB American Chemical Society (ACS) YR 2022 SN 2637-6113 SN 2637-6113 JF ACS Applied Electronic Materials VO 4 IS 11 SP 5191 OP 5198 LK http://dx.doi.org/https://doi.org/10.1021/acsaelm.2c00824 DO https://doi.org/10.1021/acsaelm.2c00824 SF ELIB - SuUB Bremen
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