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Amorphous Gadolinium Aluminate as a Dielectric and Sulfur f..:
van Dorp, Dennis H.
;
Nyns, Laura
;
Cuypers, Daniel
...
ACS Applied Electronic Materials. 1 (2019) 11 - p. 2190-2201 , 2019
Link:
https://doi.org/10.1021/acsaelm.9b00388
RT Journal T1
Amorphous Gadolinium Aluminate as a Dielectric and Sulfur for Indium Phosphide Passivation
UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acsaelm.9b00388&Exemplar=1&LAN=DE A1 van Dorp, Dennis H. A1 Nyns, Laura A1 Cuypers, Daniel A1 Ivanov, Tsvetan A1 Brizzi, Simone A1 Tallarida, Massimo A1 Fleischmann, Claudia A1 Hönicke, Philipp A1 Müller, Matthias A1 Richard, Olivier A1 Schmeißer, Dieter A1 De Gendt, Stefan A1 Lin, Dennis H. C. A1 Adelmann, Christoph PB American Chemical Society (ACS) YR 2019 SN 2637-6113 SN 2637-6113 JF ACS Applied Electronic Materials VO 1 IS 11 SP 2190 OP 2201 LK http://dx.doi.org/https://doi.org/10.1021/acsaelm.9b00388 DO https://doi.org/10.1021/acsaelm.9b00388 SF ELIB - SuUB Bremen
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