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Visualizing Ferroelectric Uniformity of Hf1–xZrxO2 Films Us..:
Chang, Shu-Jui
;
Teng, Chih-Yu
;
Lin, Yi-Jan
...
ACS Applied Materials & Interfaces. 13 (2021) 24 - p. 29212-29221 , 2021
Link:
https://doi.org/10.1021/acsami.1c08265
RT Journal T1 <Title>Visualizing Ferroelectric Uniformity of Hf1–xZrxO2 Films Using X-ray Mapping</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acsami.1c08265&Exemplar=1&LAN=DE A1 Chang, Shu-Jui A1 Teng, Chih-Yu A1 Lin, Yi-Jan A1 Wu, Tsung-Mu A1 Lee, Min-Hung A1 Lin, Bi-Hsuan A1 Tang, Mau-Tsu A1 Wu, Tai-Sing A1 Hu, Chenming A1 Tang, Ethan. Ying-Tsan A1 Tseng, Yuan-Chieh PB American Chemical Society (ACS) YR 2021 SN 1944-8244 SN 1944-8252 JF ACS Applied Materials & Interfaces VO 13 IS 24 SP 29212 OP 29221 LK http://dx.doi.org/https://doi.org/10.1021/acsami.1c08265 DO https://doi.org/10.1021/acsami.1c08265 SF ELIB - SuUB Bremen
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