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Thick BaTiO3 Epitaxial Films Integrated on Si by RF Sputter..:
Posadas, Agham B.
;
Park, Hyoju
;
Reynaud, Marc
...
ACS Applied Materials & Interfaces. 13 (2021) 43 - p. 51230-51244 , 2021
Link:
https://doi.org/10.1021/acsami.1c14048
RT Journal T1 <Title>Thick BaTiO3 Epitaxial Films Integrated on Si by RF Sputtering for Electro-Optic Modulators in Si Photonics</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acsami.1c14048&Exemplar=1&LAN=DE A1 Posadas, Agham B. A1 Park, Hyoju A1 Reynaud, Marc A1 Cao, Wei A1 Reynolds, Jamie D. A1 Guo, Wei A1 Jeyaselvan, Vadivukkarasi A1 Beskin, Ilya A1 Mashanovich, Goran Z. A1 Warner, Jamie H. A1 Demkov, Alexander A. PB American Chemical Society (ACS) YR 2021 SN 1944-8244 SN 1944-8252 JF ACS Applied Materials & Interfaces VO 13 IS 43 SP 51230 OP 51244 LK http://dx.doi.org/https://doi.org/10.1021/acsami.1c14048 DO https://doi.org/10.1021/acsami.1c14048 SF ELIB - SuUB Bremen
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