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1 Ergebnisse
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Dry-Etchable Molecular Layer-Deposited Inhibitor Using Anne..:
Lee, Seunghwan
;
Kim, Hye-Mi
;
Baek, GeonHo
.
ACS Applied Materials & Interfaces. 13 (2021) 50 - p. 60144-60153 , 2021
Link:
https://doi.org/10.1021/acsami.1c16112
RT Journal T1 <Title>Dry-Etchable Molecular Layer-Deposited Inhibitor Using Annealed Indicone Film for Nanoscale Area-Selective Deposition</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acsami.1c16112&Exemplar=1&LAN=DE A1 Lee, Seunghwan A1 Kim, Hye-Mi A1 Baek, GeonHo A1 Park, Jin-Seong PB American Chemical Society (ACS) YR 2021 SN 1944-8244 SN 1944-8252 JF ACS Applied Materials & Interfaces VO 13 IS 50 SP 60144 OP 60153 LK http://dx.doi.org/https://doi.org/10.1021/acsami.1c16112 DO https://doi.org/10.1021/acsami.1c16112 SF ELIB - SuUB Bremen
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