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1 Ergebnisse
1
Modification and Characterization of Interfacial Bonding fo..:
Zhan, Tianzhuo
;
Sahara, Keita
;
Takeuchi, Haruki
...
ACS Applied Materials & Interfaces. 14 (2022) 5 - p. 7392-7404 , 2022
Link:
https://doi.org/10.1021/acsami.1c20366
RT Journal T1
Modification and Characterization of Interfacial Bonding for Thermal Management of Ruthenium Interconnects in Next-Generation Very-Large-Scale Integration Circuits
UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acsami.1c20366&Exemplar=1&LAN=DE A1 Zhan, Tianzhuo A1 Sahara, Keita A1 Takeuchi, Haruki A1 Yokogawa, Ryo A1 Oda, Kaito A1 Jin, Zhicheng A1 Deng, Shikang A1 Tomita, Motohiro A1 Wu, Yen-Ju A1 Xu, Yibin A1 Matsuki, Takeo A1 Wang, Haidong A1 Song, Mengjie A1 Guan, Sujun A1 Ogura, Atsushi A1 Watanabe, Takanobu PB American Chemical Society (ACS) YR 2022 SN 1944-8244 SN 1944-8252 JF ACS Applied Materials & Interfaces VO 14 IS 5 SP 7392 OP 7404 LK http://dx.doi.org/https://doi.org/10.1021/acsami.1c20366 DO https://doi.org/10.1021/acsami.1c20366 SF ELIB - SuUB Bremen
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