I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Plasma-Enhanced Atomic Layer Deposition of HfO2 with Substr..:
Beladiya, Vivek
;
Faraz, Tahsin
;
Schmitt, Paul
...
ACS Applied Materials & Interfaces. 14 (2022) 12 - p. 14677-14692 , 2022
Link:
https://doi.org/10.1021/acsami.1c21889
RT Journal T1
Plasma-Enhanced Atomic Layer Deposition of HfO2 with Substrate Biasing: Thin Films for High-Reflective Mirrors
UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acsami.1c21889&Exemplar=1&LAN=DE A1 Beladiya, Vivek A1 Faraz, Tahsin A1 Schmitt, Paul A1 Munser, Anne-Sophie A1 Schröder, Sven A1 Riese, Sebastian A1 Mühlig, Christian A1 Schachtler, Daniel A1 Steger, Fabian A1 Botha, Roelene A1 Otto, Felix A1 Fritz, Torsten A1 van Helvoirt, Christian A1 Kessels, Wilhelmus M. M. A1 Gargouri, Hassan A1 Szeghalmi, Adriana PB American Chemical Society (ACS) YR 2022 SN 1944-8244 SN 1944-8252 JF ACS Applied Materials & Interfaces VO 14 IS 12 SP 14677 OP 14692 LK http://dx.doi.org/https://doi.org/10.1021/acsami.1c21889 DO https://doi.org/10.1021/acsami.1c21889 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)