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Correlation with the Microstructure and Synergistic Physioc..:
Ma, Ho Jin
;
Hong, Seongwan
;
Oh, Hyeon-Myeong
...
ACS Applied Materials & Interfaces. 14 (2022) 38 - p. 43771-43782 , 2022
Link:
https://doi.org/10.1021/acsami.2c12311
RT Journal T1 <Title>Correlation with the Microstructure and Synergistic Physiochemical Etching Resistance of Nanocomposites under Fluorine-Containing Plasma Conditions</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acsami.2c12311&Exemplar=1&LAN=DE A1 Ma, Ho Jin A1 Hong, Seongwan A1 Oh, Hyeon-Myeong A1 Kumar, Kundan A1 Kim, Mi-Ju A1 Kim, Ha-Neul A1 Ko, Jae-Woong A1 Lee, Jae-Wook A1 Lee, Hyo-Chang A1 Park, Young-Jo PB American Chemical Society (ACS) YR 2022 SN 1944-8244 SN 1944-8252 JF ACS Applied Materials & Interfaces VO 14 IS 38 SP 43771 OP 43782 LK http://dx.doi.org/https://doi.org/10.1021/acsami.2c12311 DO https://doi.org/10.1021/acsami.2c12311 SF ELIB - SuUB Bremen
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