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Comparative Study on Indium Precursors for Plasma-Enhanced ..:
Lee, Ho Young
;
Hur, Jae Seok
;
Cho, Iaan
...
ACS Applied Materials & Interfaces. 15 (2023) 44 - p. 51399-51410 , 2023
Link:
https://doi.org/10.1021/acsami.3c11796
RT Journal T1 <Title>Comparative Study on Indium Precursors for Plasma-Enhanced Atomic Layer Deposition of In2O3 and Application to High-Performance Field-Effect Transistors</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acsami.3c11796&Exemplar=1&LAN=DE A1 Lee, Ho Young A1 Hur, Jae Seok A1 Cho, Iaan A1 Choi, Cheol Hee A1 Yoon, Seong Hun A1 Kwon, Yongwoo A1 Shong, Bonggeun A1 Jeong, Jae Kyeong PB American Chemical Society (ACS) YR 2023 SN 1944-8244 SN 1944-8252 JF ACS Applied Materials & Interfaces VO 15 IS 44 SP 51399 OP 51410 LK http://dx.doi.org/https://doi.org/10.1021/acsami.3c11796 DO https://doi.org/10.1021/acsami.3c11796 SF ELIB - SuUB Bremen
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