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1 Ergebnisse
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Growth of Atomic layer-deposited Monoclinic Molybdenum Diox..:
Lee, Jae Hyeon
;
Kang, Wangu
;
Shin, Jeong Eun
...
ACS Applied Materials & Interfaces. , 2024
Link:
https://doi.org/10.1021/acsami.4c03158
RT Journal T1
Growth of Atomic layer-deposited Monoclinic Molybdenum Dioxide Films Stabilized by Tin Oxide Doping for DRAM Capacitor Electrode Applications
UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acsami.4c03158&Exemplar=1&LAN=DE A1 Lee, Jae Hyeon A1 Kang, Wangu A1 Shin, Jeong Eun A1 Park, Bo Keun A1 Chung, Taek-Mo A1 Han, Jeong Hwan PB American Chemical Society (ACS) YR 2024 SN 1944-8244 SN 1944-8252 JF ACS Applied Materials & Interfaces LK http://dx.doi.org/https://doi.org/10.1021/acsami.4c03158 DO https://doi.org/10.1021/acsami.4c03158 SF ELIB - SuUB Bremen
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