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Quantitative Analysis of the Incorporation Behaviors of Sr ..:
Chung, Min Jung
;
Jeon, Woojin
;
An, Cheol Hyun
...
ACS Applied Materials & Interfaces. 10 (2018) 10 - p. 8836-8844 , 2018
Link:
https://doi.org/10.1021/acsami.7b18807
RT Journal T1
Quantitative Analysis of the Incorporation Behaviors of Sr and Ti Atoms During the Atomic Layer Deposition of SrTiO3 Thin Films
UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acsami.7b18807&Exemplar=1&LAN=DE A1 Chung, Min Jung A1 Jeon, Woojin A1 An, Cheol Hyun A1 Kim, Sang Hyeon A1 Lee, Yoon Kyeung A1 Lee, Woongkyu A1 Hwang, Cheol Seong PB American Chemical Society (ACS) YR 2018 SN 1944-8244 SN 1944-8252 JF ACS Applied Materials & Interfaces VO 10 IS 10 SP 8836 OP 8844 LK http://dx.doi.org/https://doi.org/10.1021/acsami.7b18807 DO https://doi.org/10.1021/acsami.7b18807 SF ELIB - SuUB Bremen
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