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Atomic Layer Epitaxy of Aluminum Nitride: Unraveling the Co..:
Erwin, Steven C.
;
Lyons, John L.
ACS Applied Materials & Interfaces. 10 (2018) 23 - p. 20142-20149 , 2018
Link:
https://doi.org/10.1021/acsami.8b04104
RT Journal T1 <Title>Atomic Layer Epitaxy of Aluminum Nitride: Unraveling the Connection between Hydrogen Plasma and Carbon Contamination</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acsami.8b04104&Exemplar=1&LAN=DE A1 Erwin, Steven C. A1 Lyons, John L. PB American Chemical Society (ACS) YR 2018 SN 1944-8244 SN 1944-8252 JF ACS Applied Materials & Interfaces VO 10 IS 23 SP 20142 OP 20149 LK http://dx.doi.org/https://doi.org/10.1021/acsami.8b04104 DO https://doi.org/10.1021/acsami.8b04104 SF ELIB - SuUB Bremen
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