I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Thermal Atomic Layer Etching of Silica and Alumina Thin Fil..:
Rahman, Rezwanur
;
Mattson, Eric C.
;
Klesko, Joseph P.
...
ACS Applied Materials & Interfaces. 10 (2018) 37 - p. 31784-31794 , 2018
Link:
https://doi.org/10.1021/acsami.8b10899
RT Journal T1
Thermal Atomic Layer Etching of Silica and Alumina Thin Films Using Trimethylaluminum with Hydrogen Fluoride or Fluoroform
UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_acsami.8b10899&Exemplar=1&LAN=DE A1 Rahman, Rezwanur A1 Mattson, Eric C. A1 Klesko, Joseph P. A1 Dangerfield, Aaron A1 Rivillon-Amy, Sandrine A1 Smith, David C. A1 Hausmann, Dennis A1 Chabal, Yves J. PB American Chemical Society (ACS) YR 2018 SN 1944-8244 SN 1944-8252 JF ACS Applied Materials & Interfaces VO 10 IS 37 SP 31784 OP 31794 LK http://dx.doi.org/https://doi.org/10.1021/acsami.8b10899 DO https://doi.org/10.1021/acsami.8b10899 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)