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1 Ergebnisse
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Substrate Biasing Effect on the Physical Properties of Reac..:
Liang, Ling Yan
;
Cao, Hong Tao
;
Liu, Quan
...
ACS Applied Materials & Interfaces. 6 (2014) 4 - p. 2255-2261 , 2014
Link:
https://doi.org/10.1021/am4055589
RT Journal T1 <Title>Substrate Biasing Effect on the Physical Properties of Reactive RF-Magnetron-Sputtered Aluminum Oxide Dielectric Films on ITO Glasses</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_am4055589&Exemplar=1&LAN=DE A1 Liang, Ling Yan A1 Cao, Hong Tao A1 Liu, Quan A1 Jiang, Ke Min A1 Liu, Zhi Min A1 Zhuge, Fei A1 Deng, Fu Ling PB American Chemical Society (ACS) YR 2014 SN 1944-8244 SN 1944-8252 JF ACS Applied Materials & Interfaces VO 6 IS 4 SP 2255 OP 2261 LK http://dx.doi.org/https://doi.org/10.1021/am4055589 DO https://doi.org/10.1021/am4055589 SF ELIB - SuUB Bremen
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