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1 Ergebnisse
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Thickness and Post-annealing Effects of the Sputtered La-Ca..:
Kim, Woo-Hee
;
Lee, Nae-In
;
Lee, Jong-Ho
.
ACS Applied Materials & Interfaces. 6 (2014) 7 - p. 5199-5205 , 2014
Link:
https://doi.org/10.1021/am500490u
RT Journal T1 <Title>Thickness and Post-annealing Effects of the Sputtered La-Capping Layer Inserted between the TiN Gate and Hf-Based Dielectrics</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_am500490u&Exemplar=1&LAN=DE A1 Kim, Woo-Hee A1 Lee, Nae-In A1 Lee, Jong-Ho A1 Kim, Kug-Hwan PB American Chemical Society (ACS) YR 2014 SN 1944-8244 SN 1944-8252 JF ACS Applied Materials & Interfaces VO 6 IS 7 SP 5199 OP 5205 LK http://dx.doi.org/https://doi.org/10.1021/am500490u DO https://doi.org/10.1021/am500490u SF ELIB - SuUB Bremen
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