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1 Ergebnisse
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Nonlinear Feedback Control of Surface Roughness Using a Sto..:
Lou, Yiming
;
Christofides, Panagiotis D.
Industrial & Engineering Chemistry Research. 45 (2006) 21 - p. 7177-7189 , 2006
Link:
https://doi.org/10.1021/ie060410h
RT Journal T1 <Title>Nonlinear Feedback Control of Surface Roughness Using a Stochastic PDE: Design and Application to a Sputtering Process</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_ie060410h&Exemplar=1&LAN=DE A1 Lou, Yiming A1 Christofides, Panagiotis D. PB American Chemical Society (ACS) YR 2006 SN 0888-5885 SN 1520-5045 JF Industrial & Engineering Chemistry Research VO 45 IS 21 SP 7177 OP 7189 LK http://dx.doi.org/https://doi.org/10.1021/ie060410h DO https://doi.org/10.1021/ie060410h SF ELIB - SuUB Bremen
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