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Mechanisms for the Trimethylaluminum Reaction in Aluminum O..:
Delabie, Annelies
;
Sioncke, Sonja
;
Rip, Jens
...
The Journal of Physical Chemistry C. 115 (2011) 35 - p. 17523-17532 , 2011
Link:
https://doi.org/10.1021/jp206070y
RT Journal T1 <Title>Mechanisms for the Trimethylaluminum Reaction in Aluminum Oxide Atomic Layer Deposition on Sulfur Passivated Germanium</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_jp206070y&Exemplar=1&LAN=DE A1 Delabie, Annelies A1 Sioncke, Sonja A1 Rip, Jens A1 Van Elshocht, Sven A1 Caymax, Matty A1 Pourtois, Geoffrey A1 Pierloot, Kristine PB American Chemical Society (ACS) YR 2011 SN 1932-7447 SN 1932-7455 JF The Journal of Physical Chemistry C VO 115 IS 35 SP 17523 OP 17532 LK http://dx.doi.org/https://doi.org/10.1021/jp206070y DO https://doi.org/10.1021/jp206070y SF ELIB - SuUB Bremen
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