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Effect of O3 on Growth of Pt by Atomic Layer Deposition:
Lee, Han-Bo-Ram
;
Pickrahn, Katie L.
;
Bent, Stacey F.
The Journal of Physical Chemistry C. 118 (2014) 23 - p. 12325-12332 , 2014
Link:
https://doi.org/10.1021/jp502596n
RT Journal T1 <Title>Effect of O3 on Growth of Pt by Atomic Layer Deposition</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1021_jp502596n&Exemplar=1&LAN=DE A1 Lee, Han-Bo-Ram A1 Pickrahn, Katie L. A1 Bent, Stacey F. PB American Chemical Society (ACS) YR 2014 SN 1932-7447 SN 1932-7455 JF The Journal of Physical Chemistry C VO 118 IS 23 SP 12325 OP 12332 LK http://dx.doi.org/https://doi.org/10.1021/jp502596n DO https://doi.org/10.1021/jp502596n SF ELIB - SuUB Bremen
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