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1 Ergebnisse
1
Integrating MEMS and ICs:
Fischer, Andreas C.
;
Forsberg, Fredrik
;
Lapisa, Martin
...
Microsystems & Nanoengineering. 1 (2015) 1 - p. , 2015
Link:
https://doi.org/10.1038/micronano.2015.5
RT Journal T1 <Title>Integrating MEMS and ICs</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1038_micronano.2015.5&Exemplar=1&LAN=DE A1 Fischer, Andreas C. A1 Forsberg, Fredrik A1 Lapisa, Martin A1 Bleiker, Simon J. A1 Stemme, Göran A1 Roxhed, Niclas A1 Niklaus, Frank PB Springer Science and Business Media LLC YR 2015 SN 2055-7434 JF Microsystems & Nanoengineering VO 1 IS 1 LK http://dx.doi.org/https://doi.org/10.1038/micronano.2015.5 DO https://doi.org/10.1038/micronano.2015.5 SF ELIB - SuUB Bremen
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