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1 Ergebnisse
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Manufacture and characterization of graphene membranes with..:
Fan, Xuge
;
Smith, Anderson D.
;
Forsberg, Fredrik
...
Microsystems & Nanoengineering. 6 (2020) 1 - p. , 2020
Link:
https://doi.org/10.1038/s41378-019-0128-4
RT Journal T1
Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications
UL https://suche.suub.uni-bremen.de/peid=cr-10.1038_s41378-019-0128-4&Exemplar=1&LAN=DE A1 Fan, Xuge A1 Smith, Anderson D. A1 Forsberg, Fredrik A1 Wagner, Stefan A1 Schröder, Stephan A1 Akbari, Sayedeh Shirin Afyouni A1 Fischer, Andreas C. A1 Villanueva, Luis Guillermo A1 Östling, Mikael A1 Lemme, Max C. A1 Niklaus, Frank PB Springer Science and Business Media LLC YR 2020 SN 2055-7434 JF Microsystems & Nanoengineering VO 6 IS 1 LK http://dx.doi.org/https://doi.org/10.1038/s41378-019-0128-4 DO https://doi.org/10.1038/s41378-019-0128-4 SF ELIB - SuUB Bremen
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