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1 Ergebnisse
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Polarized holographic lithography system for high-uniformit..:
Xue, Gaopeng
;
Zhai, Qihang
;
Lu, Haiou
...
Microsystems & Nanoengineering. 7 (2021) 1 - p. , 2021
Link:
https://doi.org/10.1038/s41378-021-00256-z
RT Journal T1
Polarized holographic lithography system for high-uniformity microscale patterning with periodic tunability
UL https://suche.suub.uni-bremen.de/peid=cr-10.1038_s41378-021-00256-z&Exemplar=1&LAN=DE A1 Xue, Gaopeng A1 Zhai, Qihang A1 Lu, Haiou A1 Zhou, Qian A1 Ni, Kai A1 Lin, Liyu A1 Wang, Xiaohao A1 Li, Xinghui PB Springer Science and Business Media LLC YR 2021 SN 2055-7434 JF Microsystems & Nanoengineering VO 7 IS 1 LK http://dx.doi.org/https://doi.org/10.1038/s41378-021-00256-z DO https://doi.org/10.1038/s41378-021-00256-z SF ELIB - SuUB Bremen
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