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1 Ergebnisse
1
Near-field sub-diffraction photolithography with an elastom..:
Paik, Sangyoon
;
Kim, Gwangmook
;
Chang, Sehwan
...
Nature Communications. 11 (2020) 1 - p. , 2020
Link:
https://doi.org/10.1038/s41467-020-14439-1
RT Journal T1
Near-field sub-diffraction photolithography with an elastomeric photomask
UL https://suche.suub.uni-bremen.de/peid=cr-10.1038_s41467-020-14439-1&Exemplar=1&LAN=DE A1 Paik, Sangyoon A1 Kim, Gwangmook A1 Chang, Sehwan A1 Lee, Sooun A1 Jin, Dana A1 Jeong, Kwang-Yong A1 Lee, I Sak A1 Lee, Jekwan A1 Moon, Hongjae A1 Lee, Jaejun A1 Chang, Kiseok A1 Choi, Su Seok A1 Moon, Jeongmin A1 Jung, Soonshin A1 Kang, Shinill A1 Lee, Wooyoung A1 Choi, Heon-Jin A1 Choi, Hyunyong A1 Kim, Hyun Jae A1 Lee, Jae-Hyun A1 Cheon, Jinwoo A1 Kim, Miso A1 Myoung, Jaemin A1 Park, Hong-Gyu A1 Shim, Wooyoung PB Springer Science and Business Media LLC YR 2020 SN 2041-1723 JF Nature Communications VO 11 IS 1 LK http://dx.doi.org/https://doi.org/10.1038/s41467-020-14439-1 DO https://doi.org/10.1038/s41467-020-14439-1 SF ELIB - SuUB Bremen
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