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1 Ergebnisse
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The chemical states and atomic structure evolution of ultra..:
Lee, Fu-Ying
;
Wu, Zong-Zhe
;
Kao, Li-Chi
...
Scientific Reports. 7 (2017) 1 - p. , 2017
Link:
https://doi.org/10.1038/s41598-017-13415-y
RT Journal T1
The chemical states and atomic structure evolution of ultralow-energy high-dose Boron implanted Si(110) via laser annealing
UL https://suche.suub.uni-bremen.de/peid=cr-10.1038_s41598-017-13415-y&Exemplar=1&LAN=DE A1 Lee, Fu-Ying A1 Wu, Zong-Zhe A1 Kao, Li-Chi A1 Chang, Feng-Mei A1 Chen, Sheng-Wen A1 JangJian, Shiu-Ko A1 Cheng, Hui-Yu A1 Chen, Wei-Liang A1 Chang, Yu-Ming A1 Lo, Kuang Yao PB Springer Science and Business Media LLC YR 2017 SN 2045-2322 JF Scientific Reports VO 7 IS 1 LK http://dx.doi.org/https://doi.org/10.1038/s41598-017-13415-y DO https://doi.org/10.1038/s41598-017-13415-y SF ELIB - SuUB Bremen
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