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1 Ergebnisse
1
Approaching Defect-free Amorphous Silicon Nitride by Plasma..:
Tsai, Shu-Ju
;
Wang, Chiang-Lun
;
Lee, Hung-Chun
...
Scientific Reports. 6 (2016) 1 - p. , 2016
Link:
https://doi.org/10.1038/srep28326
RT Journal T1
Approaching Defect-free Amorphous Silicon Nitride by Plasma-assisted Atomic Beam Deposition for High Performance Gate Dielectric
UL https://suche.suub.uni-bremen.de/peid=cr-10.1038_srep28326&Exemplar=1&LAN=DE A1 Tsai, Shu-Ju A1 Wang, Chiang-Lun A1 Lee, Hung-Chun A1 Lin, Chun-Yeh A1 Chen, Jhih-Wei A1 Shiu, Hong-Wei A1 Chang, Lo-Yueh A1 Hsueh, Han-Ting A1 Chen, Hung-Ying A1 Tsai, Jyun-Yu A1 Lu, Ying-Hsin A1 Chang, Ting-Chang A1 Tu, Li-Wei A1 Teng, Hsisheng A1 Chen, Yi-Chun A1 Chen, Chia-Hao A1 Wu, Chung-Lin PB Springer Science and Business Media LLC YR 2016 SN 2045-2322 JF Scientific Reports VO 6 IS 1 LK http://dx.doi.org/https://doi.org/10.1038/srep28326 DO https://doi.org/10.1038/srep28326 SF ELIB - SuUB Bremen
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