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1 Ergebnisse
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Controlling the defects and transition layer in SiO2 films ..:
Kim, Dae-Kyoung
;
Jeong, Kwang-Sik
;
Kang, Yu-Seon
...
Scientific Reports. 6 (2016) 1 - p. , 2016
Link:
https://doi.org/10.1038/srep34945
RT Journal T1
Controlling the defects and transition layer in SiO2 films grown on 4H-SiC via direct plasma-assisted oxidation
UL https://suche.suub.uni-bremen.de/peid=cr-10.1038_srep34945&Exemplar=1&LAN=DE A1 Kim, Dae-Kyoung A1 Jeong, Kwang-Sik A1 Kang, Yu-Seon A1 Kang, Hang-Kyu A1 Cho, Sang W. A1 Kim, Sang-Ok A1 Suh, Dongchan A1 Kim, Sunjung A1 Cho, Mann-Ho PB Springer Science and Business Media LLC YR 2016 SN 2045-2322 JF Scientific Reports VO 6 IS 1 LK http://dx.doi.org/https://doi.org/10.1038/srep34945 DO https://doi.org/10.1038/srep34945 SF ELIB - SuUB Bremen
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