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1 Ergebnisse
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Characterization of ultra-shallow aluminum implants in sili..:
Hönicke, P.
;
Kayser, Y.
;
Beckhoff, B.
...
Journal of Analytical Atomic Spectrometry. 27 (2012) 9 - p. 1432 , 2012
Link:
https://doi.org/10.1039/c2ja10385k
RT Journal T1 <Title>Characterization of ultra-shallow aluminum implants in silicon by grazing incidence and grazing emission X-ray fluorescence spectroscopy</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1039_c2ja10385k&Exemplar=1&LAN=DE A1 Hönicke, P. A1 Kayser, Y. A1 Beckhoff, B. A1 Müller, M. A1 Dousse, J.-Cl. A1 Hoszowska, J. A1 Nowak, S. H. PB Royal Society of Chemistry (RSC) YR 2012 SN 0267-9477 SN 1364-5544 JF Journal of Analytical Atomic Spectrometry VO 27 IS 9 SP 1432 LK http://dx.doi.org/https://doi.org/10.1039/c2ja10385k DO https://doi.org/10.1039/c2ja10385k SF ELIB - SuUB Bremen
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