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1 Ergebnisse
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Nanoporous SiCOH/CxHy dual phase films with an ultralow die..:
Park, Jong-Min
;
Choi, Jong Kil
;
An, Cheng Jin
...
Journal of Materials Chemistry C. 1 (2013) 21 - p. 3414 , 2013
Link:
https://doi.org/10.1039/c3tc00587a
RT Journal T1
Nanoporous SiCOH/CxHy dual phase films with an ultralow dielectric constant and a high Young's modulus
UL https://suche.suub.uni-bremen.de/peid=cr-10.1039_c3tc00587a&Exemplar=1&LAN=DE A1 Park, Jong-Min A1 Choi, Jong Kil A1 An, Cheng Jin A1 Jin, Ming Liang A1 Kang, Sangwoo A1 Yun, Juyoung A1 Kong, Byung-Seon A1 Jung, Hee-Tae PB Royal Society of Chemistry (RSC) YR 2013 SN 2050-7526 SN 2050-7534 JF Journal of Materials Chemistry C VO 1 IS 21 SP 3414 LK http://dx.doi.org/https://doi.org/10.1039/c3tc00587a DO https://doi.org/10.1039/c3tc00587a SF ELIB - SuUB Bremen
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