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1 Ergebnisse
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Reactive ion etching of an ovonic threshold switch (OTS) ma..:
Kim, Doo San
;
Kim, Ju Eun
;
Gill, You Jung
...
RSC Advances. 10 (2020) 59 - p. 36141-36146 , 2020
Link:
https://doi.org/10.1039/d0ra05321j
RT Journal T1
Reactive ion etching of an ovonic threshold switch (OTS) material using hydrogen-based plasmas for non-volatile phase change memories
UL https://suche.suub.uni-bremen.de/peid=cr-10.1039_d0ra05321j&Exemplar=1&LAN=DE A1 Kim, Doo San A1 Kim, Ju Eun A1 Gill, You Jung A1 Park, Jin Woo A1 Jang, Yun Jong A1 Kim, Ye Eun A1 Choi, Hyejin A1 Kwon, Oik A1 Yeom, Geun Young PB Royal Society of Chemistry (RSC) YR 2020 SN 2046-2069 JF RSC Advances VO 10 IS 59 SP 36141 OP 36146 LK http://dx.doi.org/https://doi.org/10.1039/d0ra05321j DO https://doi.org/10.1039/d0ra05321j SF ELIB - SuUB Bremen
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