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Unravelling the effect of fluorinated ligands in hybrid EUV..:
Wu, Lianjia
;
Bespalov, Ivan
;
Witte, Katharina
...
Journal of Materials Chemistry C. 8 (2020) 42 - p. 14757-14765 , 2020
Link:
https://doi.org/10.1039/d0tc03216f
RT Journal T1 <Title>Unravelling the effect of fluorinated ligands in hybrid EUV photoresists by X-ray spectroscopy</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1039_d0tc03216f&Exemplar=1&LAN=DE A1 Wu, Lianjia A1 Bespalov, Ivan A1 Witte, Katharina A1 Lugier, Olivier A1 Haitjema, Jarich A1 Vockenhuber, Michaela A1 Ekinci, Yasin A1 Watts, Benjamin A1 Brouwer, Albert M. A1 Castellanos, Sonia PB Royal Society of Chemistry (RSC) YR 2020 SN 2050-7526 SN 2050-7534 JF Journal of Materials Chemistry C VO 8 IS 42 SP 14757 OP 14765 LK http://dx.doi.org/https://doi.org/10.1039/d0tc03216f DO https://doi.org/10.1039/d0tc03216f SF ELIB - SuUB Bremen
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