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1 Ergebnisse
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Electron-induced fragmentation mechanisms in organic monome..:
Rathore, Ashish
;
Cipriani, Maicol
;
Huang, Ching-Chung
...
Physical Chemistry Chemical Physics. 23 (2021) 15 - p. 9228-9234 , 2021
Link:
https://doi.org/10.1039/d1cp00065a
RT Journal T1
Electron-induced fragmentation mechanisms in organic monomers and their implications for photoresist optimization for EUV lithography
UL https://suche.suub.uni-bremen.de/peid=cr-10.1039_d1cp00065a&Exemplar=1&LAN=DE A1 Rathore, Ashish A1 Cipriani, Maicol A1 Huang, Ching-Chung A1 Amiaud, Lionel A1 Dablemont, Céline A1 Lafosse, Anne A1 Ingólfsson, Oddur A1 De Simone, Danilo A1 De Gendt, Stefan PB Royal Society of Chemistry (RSC) YR 2021 SN 1463-9076 SN 1463-9084 JF Physical Chemistry Chemical Physics VO 23 IS 15 SP 9228 OP 9234 LK http://dx.doi.org/https://doi.org/10.1039/d1cp00065a DO https://doi.org/10.1039/d1cp00065a SF ELIB - SuUB Bremen
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