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Role of low-energy electrons in the solubility switch of Zn..:
Rohdenburg, Markus
;
Thakur, Neha
;
Cartaya, René
..
Physical Chemistry Chemical Physics. 23 (2021) 31 - p. 16646-16657 , 2021
Link:
https://doi.org/10.1039/d1cp02334a
RT Journal T1 <Title>Role of low-energy electrons in the solubility switch of Zn-based oxocluster photoresist for extreme ultraviolet lithography</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1039_d1cp02334a&Exemplar=1&LAN=DE A1 Rohdenburg, Markus A1 Thakur, Neha A1 Cartaya, René A1 Castellanos, Sonia A1 Swiderek, Petra PB Royal Society of Chemistry (RSC) YR 2021 SN 1463-9076 SN 1463-9084 JF Physical Chemistry Chemical Physics VO 23 IS 31 SP 16646 OP 16657 LK http://dx.doi.org/https://doi.org/10.1039/d1cp02334a DO https://doi.org/10.1039/d1cp02334a SF ELIB - SuUB Bremen
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