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1 Ergebnisse
1
Oxygen relocation during HfO2 ALD on InAs:
D'Acunto, Giulio
;
Kokkonen, Esko
;
Shayesteh, Payam
...
Faraday Discussions. 236 (2022) - p. 71-85 , 2022
Link:
https://doi.org/10.1039/d1fd00116g
RT Journal T1
Oxygen relocation during HfO2 ALD on InAs
UL https://suche.suub.uni-bremen.de/peid=cr-10.1039_d1fd00116g&Exemplar=1&LAN=DE A1 D'Acunto, Giulio A1 Kokkonen, Esko A1 Shayesteh, Payam A1 Boix, Virginia A1 Rehman, Foqia A1 Mosahebfard, Zohreh A1 Lind, Erik A1 Schnadt, Joachim A1 Timm, Rainer PB Royal Society of Chemistry (RSC) YR 2022 SN 1359-6640 SN 1364-5498 JF Faraday Discussions VO 236 SP 71 OP 85 LK http://dx.doi.org/https://doi.org/10.1039/d1fd00116g DO https://doi.org/10.1039/d1fd00116g SF ELIB - SuUB Bremen
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