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1 Ergebnisse
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Dissociative ionization and electron beam induced depositio..:
Shih, Po-Yuan
;
Tafrishi, Reza
;
Cipriani, Maicol
...
Physical Chemistry Chemical Physics. 24 (2022) 16 - p. 9564-9575 , 2022
Link:
https://doi.org/10.1039/d2cp00257d
RT Journal T1 <Title>Dissociative ionization and electron beam induced deposition of tetrakis(dimethylamino)silane, a precursor for silicon nitride deposition</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1039_d2cp00257d&Exemplar=1&LAN=DE A1 Shih, Po-Yuan A1 Tafrishi, Reza A1 Cipriani, Maicol A1 Hermanns, Christian Felix A1 Oster, Jens A1 Gölzhäuser, Armin A1 Edinger, Klaus A1 Ingólfsson, Oddur PB Royal Society of Chemistry (RSC) YR 2022 SN 1463-9076 SN 1463-9084 JF Physical Chemistry Chemical Physics VO 24 IS 16 SP 9564 OP 9575 LK http://dx.doi.org/https://doi.org/10.1039/d2cp00257d DO https://doi.org/10.1039/d2cp00257d SF ELIB - SuUB Bremen
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