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1 Ergebnisse
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Advanced atomic layer deposition: metal oxide thin film gro..:
Park, Jae Chan
;
Choi, Chang Ik
;
Lee, Sang-Gil
...
Journal of Materials Chemistry C. 11 (2023) 4 - p. 1298-1303 , 2023
Link:
https://doi.org/10.1039/d2tc03485a
RT Journal T1
Advanced atomic layer deposition: metal oxide thin film growth using the discrete feeding method
UL https://suche.suub.uni-bremen.de/peid=cr-10.1039_d2tc03485a&Exemplar=1&LAN=DE A1 Park, Jae Chan A1 Choi, Chang Ik A1 Lee, Sang-Gil A1 Yoo, Seung Jo A1 Lee, Ji-Hyun A1 Jang, Jae Hyuck A1 Kim, Woo-Hee A1 Ahn, Ji-Hoon A1 Kim, Jeong Hwan A1 Park, Tae Joo PB Royal Society of Chemistry (RSC) YR 2023 SN 2050-7526 SN 2050-7534 JF Journal of Materials Chemistry C VO 11 IS 4 SP 1298 OP 1303 LK http://dx.doi.org/https://doi.org/10.1039/d2tc03485a DO https://doi.org/10.1039/d2tc03485a SF ELIB - SuUB Bremen
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