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Chemisorption of silicon tetrachloride on silicon nitride: ..:
Chowdhury, Tanzia
;
Khumaini, Khabib
;
Hidayat, Romel
..
Physical Chemistry Chemical Physics. 26 (2024) 15 - p. 11597-11603 , 2024
Link:
https://doi.org/10.1039/d3cp05799b
RT Journal T1 <Title>Chemisorption of silicon tetrachloride on silicon nitride: a density functional theory study</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1039_d3cp05799b&Exemplar=1&LAN=DE A1 Chowdhury, Tanzia A1 Khumaini, Khabib A1 Hidayat, Romel A1 Kim, Hye-Lee A1 Lee, Won-Jun PB Royal Society of Chemistry (RSC) YR 2024 SN 1463-9076 SN 1463-9084 JF Physical Chemistry Chemical Physics VO 26 IS 15 SP 11597 OP 11603 LK http://dx.doi.org/https://doi.org/10.1039/d3cp05799b DO https://doi.org/10.1039/d3cp05799b SF ELIB - SuUB Bremen
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