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1 Ergebnisse
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A novel water developable tetraphenyltin-based nonchemicall..:
Wang, Zhihao
;
Chen, Jinping
;
Yu, Tianjun
...
RSC Applied Interfaces. 1 (2024) 3 - p. 544-551 , 2024
Link:
https://doi.org/10.1039/d3lf00254c
RT Journal T1
A novel water developable tetraphenyltin-based nonchemically-amplified molecular resist for sub-13 nm lithography
UL https://suche.suub.uni-bremen.de/peid=cr-10.1039_d3lf00254c&Exemplar=1&LAN=DE A1 Wang, Zhihao A1 Chen, Jinping A1 Yu, Tianjun A1 Zeng, Yi A1 Guo, Xudong A1 Wang, Shuangqing A1 Hu, Rui A1 Tian, Peng A1 Vockenhuber, Michaela A1 Kazazis, Dimitrios A1 Ekinci, Yasin A1 Yang, Guoqiang A1 Li, Yi PB Royal Society of Chemistry (RSC) YR 2024 SN 2755-3701 JF RSC Applied Interfaces VO 1 IS 3 SP 544 OP 551 LK http://dx.doi.org/https://doi.org/10.1039/d3lf00254c DO https://doi.org/10.1039/d3lf00254c SF ELIB - SuUB Bremen
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