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1 Ergebnisse
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Enhanced pseudo-atomic layer deposition of antimony telluri..:
Jeon, Sangmin
;
Jeon, Jeong Woo
;
Choi, Wonho
...
Journal of Materials Chemistry C. 11 (2023) 11 - p. 3726-3735 , 2023
Link:
https://doi.org/10.1039/d3tc00007a
RT Journal T1 <Title>Enhanced pseudo-atomic layer deposition of antimony telluride thin films by co-injecting NH3 gas with both precursors</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1039_d3tc00007a&Exemplar=1&LAN=DE A1 Jeon, Sangmin A1 Jeon, Jeong Woo A1 Choi, Wonho A1 Park, Byongwoo A1 Jeon, Gwangsik A1 Yoo, Chanyoung A1 Hwang, Cheol Seong PB Royal Society of Chemistry (RSC) YR 2023 SN 2050-7526 SN 2050-7534 JF Journal of Materials Chemistry C VO 11 IS 11 SP 3726 OP 3735 LK http://dx.doi.org/https://doi.org/10.1039/d3tc00007a DO https://doi.org/10.1039/d3tc00007a SF ELIB - SuUB Bremen
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