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Enhancing chemisorption efficiency and thin-film characteri..:
Lee, Ae Jin
;
Lee, Seungwoo
;
Han, Dong Hee
..
Journal of Materials Chemistry C. 11 (2023) 21 - p. 6894-6901 , 2023
Link:
https://doi.org/10.1039/d3tc00704a
RT Journal T1 <Title>Enhancing chemisorption efficiency and thin-film characteristics via a discrete feeding method in high-k dielectric atomic layer deposition for preventing interfacial layer formation</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1039_d3tc00704a&Exemplar=1&LAN=DE A1 Lee, Ae Jin A1 Lee, Seungwoo A1 Han, Dong Hee A1 Kim, Youngjin A1 Jeon, Woojin PB Royal Society of Chemistry (RSC) YR 2023 SN 2050-7526 SN 2050-7534 JF Journal of Materials Chemistry C VO 11 IS 21 SP 6894 OP 6901 LK http://dx.doi.org/https://doi.org/10.1039/d3tc00704a DO https://doi.org/10.1039/d3tc00704a SF ELIB - SuUB Bremen
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