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1 Ergebnisse
1
Nanometer positioning accuracy over a long term traveling s..:
Naeim, I.
;
Khodier, S.
International Journal of Metrology and Quality Engineering. 3 (2012) 2 - p. 97-100 , 2012
Link:
https://doi.org/10.1051/ijmqe/2012013
RT Journal T1 <Title>Nanometer positioning accuracy over a long term traveling stagebased on heterodyne interferometry</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1051_ijmqe_2012013&Exemplar=1&LAN=DE A1 Naeim, I. A1 Khodier, S. PB EDP Sciences YR 2012 SN 2107-6839 SN 2107-6847 JF International Journal of Metrology and Quality Engineering VO 3 IS 2 SP 97 OP 100 LK http://dx.doi.org/https://doi.org/10.1051/ijmqe/2012013 DO https://doi.org/10.1051/ijmqe/2012013 SF ELIB - SuUB Bremen
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