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Stress relaxation in Mo/Si multilayer structures:
Kola, R. R.
;
Windt, D. L.
;
Waskiewicz, W. K.
...
Applied Physics Letters. 60 (1992) 25 - p. 3120-3122 , 1992
Link:
https://doi.org/10.1063/1.106771
RT Journal T1 <Title>Stress relaxation in Mo/Si multilayer structures</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.106771&Exemplar=1&LAN=DE A1 Kola, R. R. A1 Windt, D. L. A1 Waskiewicz, W. K. A1 Weir, B. E. A1 Hull, R. A1 Celler, G. K. A1 Volkert, C. A. PB AIP Publishing YR 1992 SN 0003-6951 SN 1077-3118 JF Applied Physics Letters VO 60 IS 25 SP 3120 OP 3122 LK http://dx.doi.org/https://doi.org/10.1063/1.106771 DO https://doi.org/10.1063/1.106771 SF ELIB - SuUB Bremen
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