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1 Ergebnisse
1
Special modulator for high frequency, low-voltage plasma im..:
Tian, Xiubo
;
Wang, Xiaofeng
;
Tang, Baoyin
...
Review of Scientific Instruments. 70 (1999) 3 - p. 1824-1828 , 1999
Link:
https://doi.org/10.1063/1.1149675
RT Journal T1 <Title>Special modulator for high frequency, low-voltage plasma immersion ion implantation</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.1149675&Exemplar=1&LAN=DE A1 Tian, Xiubo A1 Wang, Xiaofeng A1 Tang, Baoyin A1 Chu, Paul K. A1 Ko, Ping K. A1 Cheng, Yiu-Chung PB AIP Publishing YR 1999 SN 0034-6748 SN 1089-7623 JF Review of Scientific Instruments VO 70 IS 3 SP 1824 OP 1828 LK http://dx.doi.org/https://doi.org/10.1063/1.1149675 DO https://doi.org/10.1063/1.1149675 SF ELIB - SuUB Bremen
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