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1 Ergebnisse
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One-dimensional fluid model for an rf methane plasma of int..:
Herrebout, D.
;
Bogaerts, A.
;
Yan, M.
...
Journal of Applied Physics. 90 (2001) 2 - p. 570-579 , 2001
Link:
https://doi.org/10.1063/1.1378059
RT Journal T1
One-dimensional fluid model for an rf methane plasma of interest in deposition of diamond-like carbon layers
UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.1378059&Exemplar=1&LAN=DE A1 Herrebout, D. A1 Bogaerts, A. A1 Yan, M. A1 Gijbels, R. A1 Goedheer, W. A1 Dekempeneer, E. PB AIP Publishing YR 2001 SN 0021-8979 SN 1089-7550 JF Journal of Applied Physics VO 90 IS 2 SP 570 OP 579 LK http://dx.doi.org/https://doi.org/10.1063/1.1378059 DO https://doi.org/10.1063/1.1378059 SF ELIB - SuUB Bremen
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