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Ion beam deposition of fluorinated amorphous carbon:
Ronning, C.
;
Büttner, M.
;
Vetter, U.
...
Journal of Applied Physics. 90 (2001) 8 - p. 4237-4245 , 2001
Link:
https://doi.org/10.1063/1.1404419
RT Journal T1 <Title>Ion beam deposition of fluorinated amorphous carbon</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.1404419&Exemplar=1&LAN=DE A1 Ronning, C. A1 Büttner, M. A1 Vetter, U. A1 Feldermann, H. A1 Wondratschek, O. A1 Hofsäss, H. A1 Brunner, W. A1 Au, Frederick C. K. A1 Li, Quan A1 Lee, S. T. PB AIP Publishing YR 2001 SN 0021-8979 SN 1089-7550 JF Journal of Applied Physics VO 90 IS 8 SP 4237 OP 4245 LK http://dx.doi.org/https://doi.org/10.1063/1.1404419 DO https://doi.org/10.1063/1.1404419 SF ELIB - SuUB Bremen
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