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Stress in undoped and doped laser crystallized poly-Si:
Lengsfeld, P.
;
Nickel, N. H.
;
Genzel, Ch.
.
Journal of Applied Physics. 91 (2002) 11 - p. 9128-9135 , 2002
Link:
https://doi.org/10.1063/1.1476083
RT Journal T1 <Title>Stress in undoped and doped laser crystallized poly-Si</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.1476083&Exemplar=1&LAN=DE A1 Lengsfeld, P. A1 Nickel, N. H. A1 Genzel, Ch. A1 Fuhs, W. PB AIP Publishing YR 2002 SN 0021-8979 SN 1089-7550 JF Journal of Applied Physics VO 91 IS 11 SP 9128 OP 9135 LK http://dx.doi.org/https://doi.org/10.1063/1.1476083 DO https://doi.org/10.1063/1.1476083 SF ELIB - SuUB Bremen
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