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1 Ergebnisse
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Unoxidized porous Si as an isolation material for mixed-sig..:
Kim, Han-Su
;
Xie, Ya-Hong
;
DeVincentis, Marc
..
Journal of Applied Physics. 93 (2003) 7 - p. 4226-4231 , 2003
Link:
https://doi.org/10.1063/1.1555700
RT Journal T1
Unoxidized porous Si as an isolation material for mixed-signal integrated circuit applications
UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.1555700&Exemplar=1&LAN=DE A1 Kim, Han-Su A1 Xie, Ya-Hong A1 DeVincentis, Marc A1 Itoh, Tatsuo A1 Jenkins, Keith A. PB AIP Publishing YR 2003 SN 0021-8979 SN 1089-7550 JF Journal of Applied Physics VO 93 IS 7 SP 4226 OP 4231 LK http://dx.doi.org/https://doi.org/10.1063/1.1555700 DO https://doi.org/10.1063/1.1555700 SF ELIB - SuUB Bremen
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