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1 Ergebnisse
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Massively parallel, large-area maskless lithography:
Klosner, Marc
;
Jain, Kanti
Applied Physics Letters. 84 (2004) 15 - p. 2880-2882 , 2004
Link:
https://doi.org/10.1063/1.1699449
RT Journal T1 <Title>Massively parallel, large-area maskless lithography</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.1699449&Exemplar=1&LAN=DE A1 Klosner, Marc A1 Jain, Kanti PB AIP Publishing YR 2004 SN 0003-6951 SN 1077-3118 JF Applied Physics Letters VO 84 IS 15 SP 2880 OP 2882 LK http://dx.doi.org/https://doi.org/10.1063/1.1699449 DO https://doi.org/10.1063/1.1699449 SF ELIB - SuUB Bremen
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