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Simultaneous determination of ultra-shallow junction depth ..:
Salnick, Alex
;
Nicolaides, Lena
;
Opsal, Jon
...
Review of Scientific Instruments. 75 (2004) 6 - p. 2144-2148 , 2004
Link:
https://doi.org/10.1063/1.1755445
RT Journal T1 <Title>Simultaneous determination of ultra-shallow junction depth and abruptness using thermal wave technique</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.1755445&Exemplar=1&LAN=DE A1 Salnick, Alex A1 Nicolaides, Lena A1 Opsal, Jon A1 Jain, Amitabh A1 Rogers, Duncan A1 Robertson, Lance PB AIP Publishing YR 2004 SN 0034-6748 SN 1089-7623 JF Review of Scientific Instruments VO 75 IS 6 SP 2144 OP 2148 LK http://dx.doi.org/https://doi.org/10.1063/1.1755445 DO https://doi.org/10.1063/1.1755445 SF ELIB - SuUB Bremen
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