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1 Ergebnisse
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Precipitation analysis on P-implanted silicon by reflectivi..:
Huang, Shih-An
;
Lo, Kuang-Yao
;
Hsu, Li-Hsuan
.
Applied Physics Letters. 92 (2008) 6 - p. , 2008
Link:
https://doi.org/10.1063/1.2839575
RT Journal T1
Precipitation analysis on P-implanted silicon by reflectivity spectrum
UL https://suche.suub.uni-bremen.de/peid=cr-10.1063_1.2839575&Exemplar=1&LAN=DE A1 Huang, Shih-An A1 Lo, Kuang-Yao A1 Hsu, Li-Hsuan A1 Hung, Kuang-Ming PB AIP Publishing YR 2008 SN 0003-6951 SN 1077-3118 JF Applied Physics Letters VO 92 IS 6 LK http://dx.doi.org/https://doi.org/10.1063/1.2839575 DO https://doi.org/10.1063/1.2839575 SF ELIB - SuUB Bremen
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